Refractive and diffractive elements for micro-optical systems

Philippe Nussbaum; Hans Peter Herzig

doi:10.1117/12.284572

2 September 1997 Refractive and diffractive elements for micro-optical systems

Philippe Nussbaum, Hans Peter Herzig

Proceedings Volume 3226, Microelectronic Structures and MEMS for Optical Processing III; (1997) https://doi.org/10.1117/12.284572
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

We report on our activities in the design, fabrication and characterization of refractive and diffractive micro-optical elements and their integration into micro-systems. Various fabrication techniques like interferometric recording, mask projection steps, or direct writing are used to generate high resolution surface-relief profiles in photoresist. The transfer of the surface profile into glass or quartz is possible using reactive ion etching (RIE). Low-cost micro- optical elements can be fabricated in organic polymers using various replication techniques. Different types of micro- optical elements can be integrated on a substrate together with other opto-electronic components. We present selected applications in the field of laser beam shaping, space communications and blood gas sensors.

Citation Download Citation

Philippe Nussbaum and Hans Peter Herzig "Refractive and diffractive elements for micro-optical systems", Proc. SPIE 3226, Microelectronic Structures and MEMS for Optical Processing III, (2 September 1997); https://doi.org/10.1117/12.284572

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