Investigation of ZrO2(Ce4+) thin film for oxygen sensor

Guolong Tan; Yanqi Wang; Hongfei Zhang; Xijun Wu

doi:10.1117/12.293526

14 November 1997 ZrO₂(Ce⁴⁺) thin film for oxygen sensor

Guolong Tan, Yanqi Wang, Hongfei Zhang, Xijun Wu

Proceedings Volume 3241, Smart Materials, Structures, and Integrated Systems; (1997) https://doi.org/10.1117/12.293526
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

The ionic conductivity and sensitivity of a series of Ce⁴⁺-doped zirconia thin film synthesized by sol-gel process are studied. The conductivity of the film is mainly depended on the doping ions and its concentration. The result shows that the ZrO₂(Ce⁴⁺) solid solution is well suited to maintain the ionic conductivity in a wide composition range. A physical model has been proposed to explain the high sensitivity of the thin film.

Citation Download Citation

Guolong Tan, Yanqi Wang, Hongfei Zhang, and Xijun Wu "ZrO₂(Ce⁴⁺) thin film for oxygen sensor", Proc. SPIE 3241, Smart Materials, Structures, and Integrated Systems, (14 November 1997); https://doi.org/10.1117/12.293526

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