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14 November 1997 3D micro-EDM machining technique
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Abstract
The micro-EDM machining technique has been broadly applied to fabricate 2D and 3D micro-parts. It is difficult to produce a metal mold with dimension from several micrometers and with the accuracy in the level of micrometers . Poor accuracy comes from electrode wear during 3D micro-EDM machining. In this research, an efficient wear compensation cooperated with CAD/CAM path compensation is provided to improve the machining accuracy. In the experiments, by fabricating a micro-gear and sculpturing letters on surface of tiny steel ball, the technique provided in this research shows the expected results successfully.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chia-Lung Kuo, Shung-Tong Chen, Ying-Jeng Engin Wu, and Albert Tieng-Tsung Yen "3D micro-EDM machining technique", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293543
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