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14 November 1997 Application of jet-printed PZT layers for actuation of small beams, membranes and a 2D scanning actuator
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To close the technological thickness gap between vary thin PZT-layer deposition and bulk PZT, a new technology called Jet Printing has been introduced recently, which can be used to deposit layers between 5 and 100 micrometers thickness. This technology is used for the first time to fabricate bimorph actuator elements suitable for actuation purposes in MEMS. At first, 10 to 40 micrometers thin PZT layers are deposited on beam shaped structures made of 30 micrometers thick steel. This basic actuator beams were stimulated by an AC voltage, and the reflected laser beam showed reasonable dynamic deflection angels of about 5 degrees maximum. Secondly, deposition on anisotropically etched silicon membranes with varying thickness from 25 to 125 micrometers was carried out. It appeared, that at a membrane thickness lower than 50 micrometers technologically effects can break the membrane. However, for membranes thicker than that, direct deposition after anisotropic etching could be applied successfully, and dynamic deflection of this membranes could be proofed by laser interferometric measurement. Finally, a small structure capable of diverting a laser beam and carrying out 2D scanning was designed and fabricated from 30 micrometers thick steel using laser ablation. The scanner is actuated by four actuator beams, on which 30 micrometers thick PZT has been Jet Printed as the actuating material. The electrodes on the beams can be stimulated separately, and therefore control the scanning direction. Experiments showed the capability of the structure to be actuated, and deflection angels up to 5 degrees could be measured.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Schroth, Masaaki Ichiki, Ryutaro Maeda, Jun Akedo, and Sohei Matsumoto "Application of jet-printed PZT layers for actuation of small beams, membranes and a 2D scanning actuator", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997);

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