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14 November 1997 Design and fabrication of wireless remotely readable MEMS accelerometers
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Abstract
The integration of MEMS, SAW devices and required microelectronics and conformal antenna to realize a programmable wireless accelerometer is presented in this paper. This unique combination of technologies results in a novel accelerometer that can be remotely sensed by a microwave system with the advantage of no power requirements at the sensor site. The microaccelerometer presented is simple in construction and easy to manufacture with existing silicon micromachining techniques. The relatively small size of the sensor makes it an ideal conformal sensor. The accelerometer finds application as air bag deployment sensors, vibration sensors for noise control, deflection and strain sensors, inertial and dimensional positioning systems, ABS/traction control, smart suspension, active roll stabilization and four wheel steering. The wireless accelerometer is very attractive to study the response of a 'dummy' in automobile crash test.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijay K. Varadan, Hareesh Subramanian, and Vasundara V. Varadan "Design and fabrication of wireless remotely readable MEMS accelerometers", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293537
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