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14 November 1997 Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology
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Abstract
We have developed the high sensitivity fiber optic Fabry- Perot pressure sensor with a Si3N4/SiO2/Si3N4(N/O/N) diaphragm fabricated using micromachining technology in the anisotropic etchant KOH solution. The configuration of this sensor was a 2 cm length fiber optic Fabry-Perot interferometer bonded to a 0.6 micrometers thick diaphragm. When the area of the N/O/N diaphragm used in the experiments was 2 X 2 mm2, the pressure sensitivity was 0.11 radian/kPa, and when the area was 8 X 8 mm2, the pressure sensitivity was increased to 1.57 radian/kPa. The phase change was dependent upon the applied pressure linearly.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Myung Gyoo Kim, Jaehee Park, Shin-Won Kang, and Byung-Ki Sohn "Fiber optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293555
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