Microfabrication of capillary columns on silicon

Goib Wiranto; Noel D. Samaan; Dennis E. Mulcahy; David E. Davey

doi:10.1117/12.293567

14 November 1997 Microfabrication of capillary columns on silicon

Goib Wiranto, Noel D. Samaan, Dennis E. Mulcahy, David E. Davey

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293567
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

This paper describes the design and fabrication techniques of micro capillary columns as the main components in a microengineered gas chromatography system. The system is to be developed using silicon micromachining technology, and is designed as a flexible device consisting of four basic modules: a sample injection system, an open tubular column, a gas detector system, and an electronic circuit. Being designed in a modular structure, the system can be operated in a single and multidimensional configurations. The overall device measures 6 cm X 11 cm, making it very portable for field operation. The micromachined capillary columns are isotopically etched on silicon and sealed by Pyrex glass cover plate, measuring 125 cm long, and having rectangular shaped cross sections.

Citation Download Citation

Goib Wiranto, Noel D. Samaan, Dennis E. Mulcahy, and David E. Davey "Microfabrication of capillary columns on silicon", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293567

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