Micropump based on temperature dependence of liquid viscosity

Sohei Matsumoto; Andreas Klein; Andreas Schroth; Ryutaro Maeda

doi:10.1117/12.293557

14 November 1997 Micropump based on temperature dependence of liquid viscosity

Sohei Matsumoto, Andreas Klein, Andreas Schroth, Ryutaro Maeda

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293557
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

A new micropump principle without mechanical valves is proposed. Flow rectification is achieved by a pair of dynamic valves, the pressure drop through each of which can be individually adjusted by controlling the liquid temperature in the valve channel, thus changing its viscosity. This method has a potential for miniaturization of complex liquid handling systems, since it allows bi- directional liquid transfer with a single micropump, by applying appropriate activation sequences for the valves and the pressure source. The necessary specification and the possible performance are predicted through FEM analysis of thermal and flow systems. By a preliminary experiment using a prototype pump structure fabricated with silicon based technology, the basic function of the valve elements has been confirmed.

Citation Download Citation

Sohei Matsumoto, Andreas Klein, Andreas Schroth, and Ryutaro Maeda "Micropump based on temperature dependence of liquid viscosity", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293557

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