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14 November 1997 New type of thermal analyzer with a micro-air-bridge heater
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Abstract
Miniaturized sensor for thermal analysis is fabricated using micromachining technique and its fundament al characteristics are obtained. This device fabricated in a Si substrate consists of monolithically integrated components of an air-bridge type microheater, a thin film thermocouple and a sample-holder. Boiling points of liquid samples, water and methanol, are observed in the heating curve and the heating-rate curve, and sudden decrease of the temperature at the dropping time of the liquid samples at room temperature due to the effect of evaporation heat is also observed. Loss of the sample due to the evaporation during heating was theoretically discussed.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mitsuteru Kimura and Junichi Hayasaka "New type of thermal analyzer with a micro-air-bridge heater", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293550
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