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14 November 1997 Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves
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Abstract
As a novel application of Silicon-based integrated optics, first result of a compact Mach-Zehnder interferometer are presented. This passive device is transformed into an active one by the deposition of a ZnO thin film transducer on the reference arm where the acousto-optics mechanism generates a sinusoidal phase modulation.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric Bonnotte, Christophe Gorecki, Hiroshi Toshiyoshi, and Hideki Kawakatsu "Silicon-based interferometric sensor with phase modulation driven by surface acoustic waves", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293553
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