Improvement of laser-induced surface damage in CsLiB6O10 crystal by ion etching

Tomosumi Kamimura; Masashi Yoshimura; Takahiro Inoue; Yusuke Mori; Takatomo Sasaki; Hidetsugu Yoshida; Masahiro Nakatsuka; Kunio Yoshida; Kyoichi Deki; Masahiro Horiguchi

doi:10.1117/12.307000

20 April 1998 Improvement of laser-induced surface damage in CsLiB6O10 crystal by ion etching

Tomosumi Kamimura, Masashi Yoshimura, Takahiro Inoue, Yusuke Mori, Takatomo Sasaki, Hidetsugu Yoshida, Masahiro Nakatsuka, Kunio Yoshida, Kyoichi Deki, Masahiro Horiguchi

Author Affiliations +

Proceedings Volume 3244, Laser-Induced Damage in Optical Materials: 1997; (1998) https://doi.org/10.1117/12.307000
Event: Laser-Induced Damage in Optical Materials: 1997, 1997, Boulder, CO, United States

Abstract

This paper investigates ion etching process to the surface of CsLiB₆O₁₀ (CLBO) crystal. Laser-induced surface damage was reduced and surface durability of CLBO crystal was improved by removing the subsurface embedded polishing compound. There was no surface degradation as a result of the ion etching. The effects of ion etching on surface damage were measured by a 1-on-1 test at a laser wavelength of 266 nm. Durability of the CLBO crystal was tested by the approximately 7 W fourth harmonic generated by a Nd:YAG laser. The durability of the ion etched surface was improved more than 10 times as compared with the as-polished surface.

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Tomosumi Kamimura, Masashi Yoshimura, Takahiro Inoue, Yusuke Mori, Takatomo Sasaki, Hidetsugu Yoshida, Masahiro Nakatsuka, Kunio Yoshida, Kyoichi Deki, and Masahiro Horiguchi "Improvement of laser-induced surface damage in CsLiB6O10 crystal by ion etching", Proc. SPIE 3244, Laser-Induced Damage in Optical Materials: 1997, (20 April 1998); https://doi.org/10.1117/12.307000

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