Techniques Of Measurement Of Reflectance And Transmittance Of Thin Film Coatings As A Function Of Temperature

D. L. Decker; V. A. Hodgkin

doi:10.1117/12.933301

29 April 1982 Techniques Of Measurement Of Reflectance And Transmittance Of Thin Film Coatings As A Function Of Temperature

D. L. Decker, V. A. Hodgkin

Author Affiliations +

Proceedings Volume 0325, Optical Thin Films; (1982) https://doi.org/10.1117/12.933301
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

Optical reflectance and transmittance are frequently employed in the evaluation of thin film materials and components. Accurate measurement of these quantities is an experimental problem with numerous subtle sources of systematic error. For precise analysis, it is essential that these measurements be performed at the actual temperatures of use - in many modern applications, this implies temperatures substantially different from room temperature. This paper describes methods generally employed for both absolute and relative measurements, including optical and electronic signal processing implications. Although detector spatial nonuniformity is widely recognized as a serious concern, equally so and often totally neglected are variations in transmission of windows employed in elevated or cryogenic temperature measurements. Another serious problem, often not adequately recognized, concerns the degradation of the sample from condensed contaminants at cryogenic temperatures or oxides at high temperatures. An instrument will be described which successfully addresses these problems and is capable of providing measurements of sample reflectance or transmittance while protecting the sample under ultrahigh vacuum (< 10-9 torr). Relative reflectance data taken with this instrument are presented and analyzed which have an accuracy of ±3 x 10 -5.

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D. L. Decker and V. A. Hodgkin "Techniques Of Measurement Of Reflectance And Transmittance Of Thin Film Coatings As A Function Of Temperature", Proc. SPIE 0325, Optical Thin Films, (29 April 1982); https://doi.org/10.1117/12.933301

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