Comparison of surface PSDs calculated from both AFM profiles and scatter data

John C. Stover; Vladimir I. Ivakhnenko; Craig A. Scheer

doi:10.1117/12.304410

1 April 1998 Comparison of surface PSDs calculated from both AFM profiles and scatter data

John C. Stover, Vladimir I. Ivakhnenko, Craig A. Scheer

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304410
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

The paper reviews the process for comparing PSD's generated by profile measurements and scatter measurements. Rayleigh scatter as a noise source is reviewed and a new polarization based measurement is presented for discrimination between roughness scatter and particulate scatter. AFM results are compared for both a molybdenum mirror and a silicon wafer. The mirror compares well but 2D detrending technique used impacts the results for the wafer.

Citation Download Citation

John C. Stover, Vladimir I. Ivakhnenko, and Craig A. Scheer "Comparison of surface PSDs calculated from both AFM profiles and scatter data", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304410

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