Scanning auger microscopy characterization of magnetic hard disks

Jeffrey R. Kingsley; David W. Harris; D. L. Neiman; Jingyu Huang

doi:10.1117/12.304400

1 April 1998 Scanning auger microscopy characterization of magnetic hard disks

Jeffrey R. Kingsley, David W. Harris, D. L. Neiman, Jingyu Huang

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304400
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

Applications of Zalar^TM rotation and field emission Auger analysis in various magnetic hard disc problems will be presented. These applications include thin layer structure characterization, low concentration contaminant (0.1 - 0.5 atomic percent) detection at deeper interfaces (greater than 1000 angstroms), and small particle (approximately 1000 angstroms) contaminant identification.

Citation Download Citation

Jeffrey R. Kingsley, David W. Harris, D. L. Neiman, and Jingyu Huang "Scanning auger microscopy characterization of magnetic hard disks", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304400

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