Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements

Hendrik Rothe; Dorothee Hueser; Andre Kasper

doi:10.1117/12.304389

1 April 1998 Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements

Hendrik Rothe, Dorothee Hueser, Andre Kasper

Author Affiliations +

Proceedings Volume 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II; (1998) https://doi.org/10.1117/12.304389
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

It is pointed out that the von-Mises distribution can replace the Gaussian distribution for circular or spherical vector fields, i.e. BRDF data obtained from a variety of technical surfaces by stray light measuring or sensing. For the purpose of in line quality control formulae for the parameters corresponding to mean and variance in Gaussian distributions as well as parameter tests and confidence intervals for circular unimodal vector fields will be given. A family of scatter sensors is introduced. Finally, measurement results will be compared to circular statistical inference.

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Hendrik Rothe, Dorothee Hueser, and Andre Kasper "Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements", Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, (1 April 1998); https://doi.org/10.1117/12.304389

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