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15 March 1998 Fill factor improvement using microlens arrays
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Abstract
Optoelectronic devices often make use of detectors or spatial light modulators. These components frequently are integrated with other electronics or devices that limit their fill factor on the substrate to less than unity. A frequently quoted approach to overcoming the fill factor problem is to use microlens arrays in conjunction with the components to increase the fill factor to near unity. However, the effect of the field angle over which the devices must operate is often not considered. In this paper we present results of geometric and physical optic analyses of microlens arrays in conjunction with detectors and modulators. Design equations for the microlens arrays are derived, the effect of field angle is quantified, and expected fill factor improvement is presented. Examples of possible systems applications are also considered.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edward A. Watson, Donald T. Miller, and Kenneth J. Barnard "Fill factor improvement using microlens arrays", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302390
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