Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems

Harri K. Kopola; Pentti Karioja; Outi Rusanen; Heikki Lehto; Jorma Lammasniemi

doi:10.1117/12.302409

15 March 1998 Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems

Harri K. Kopola, Pentti Karioja, Outi Rusanen, Heikki Lehto, Jorma Lammasniemi

Author Affiliations +

Proceedings Volume 3276, Miniaturized Systems with Micro-Optics and Micromechanics III; (1998) https://doi.org/10.1117/12.302409
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

This paper presents an overview of the research and development work on packaging and manufacturing different optoelectronic modules and microsystems for spectroscopic applications at VTT Electronics. Four different spectrometer concepts are analyzed: a multiwavelength detector module, an LED array spectrometer module, a PGP-spectrograph and an IR- spectrometer on silicon. The construction, main features, packaging concepts and performance are reviewed.

Citation Download Citation

Harri K. Kopola, Pentti Karioja, Outi Rusanen, Heikki Lehto, and Jorma Lammasniemi "Hybridization, assembling, and testing of miniaturized optoelectronic modules for sensors and microsystems", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302409

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