Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers

Rolf Riemenschneider; Joachim Peerlings; Joachim Pfeiffer; A. Dehe; Andreas Vogt; Peter M. Meissner; Hans L. Hartnagel; N. Chitica; Juergen Daleiden-; Klaus P. Streubel; Harald Kuenzel; W. Goertz

doi:10.1117/12.302395

15 March 1998 Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers

Rolf Riemenschneider, Joachim Peerlings, Joachim Pfeiffer, A. Dehe, Andreas Vogt, Peter M. Meissner, Hans L. Hartnagel, N. Chitica, Juergen Daleiden-, Klaus P. Streubel, Harald Kuenzel, W. Goertz

Author Affiliations +

Proceedings Volume 3276, Miniaturized Systems with Micro-Optics and Micromechanics III; (1998) https://doi.org/10.1117/12.302395
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

Monolithically-integrated wavelength-selective receivers are needed for dense wavelength-division multiplex transmission in the 1.55 micrometers wavelength regime. We present a novel concept for tunable optical Fabry-Perot filters with long resonant cavities of about 30 micrometers . III-V semiconductor technology compatible to PIN detector integration is applied to fabricate bulk-micromachined movable membrane Bragg mirrors. The initial membrane curvature as well as the actuation-induced bending are analyzed using a white light interferometer. Continuous filter tuning achieved by thermal or electrostatical actuation is analyzed in the optical as well as in the mechanical regime. Opto-mechanical constraints of the realized filters are discussed in view of novel epitaxial demands and optimum design for micro-opto- electro-mechanical receiver systems.

Citation Download Citation

Rolf Riemenschneider, Joachim Peerlings, Joachim Pfeiffer, A. Dehe, Andreas Vogt, Peter M. Meissner, Hans L. Hartnagel, N. Chitica, Juergen Daleiden-, Klaus P. Streubel, Harald Kuenzel, and W. Goertz "Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302395

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available