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15 March 1998 Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers
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Abstract
Monolithically-integrated wavelength-selective receivers are needed for dense wavelength-division multiplex transmission in the 1.55 micrometers wavelength regime. We present a novel concept for tunable optical Fabry-Perot filters with long resonant cavities of about 30 micrometers . III-V semiconductor technology compatible to PIN detector integration is applied to fabricate bulk-micromachined movable membrane Bragg mirrors. The initial membrane curvature as well as the actuation-induced bending are analyzed using a white light interferometer. Continuous filter tuning achieved by thermal or electrostatical actuation is analyzed in the optical as well as in the mechanical regime. Opto-mechanical constraints of the realized filters are discussed in view of novel epitaxial demands and optimum design for micro-opto- electro-mechanical receiver systems.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rolf Riemenschneider, Joachim Peerlings, Joachim Pfeiffer, A. Dehe, Andreas Vogt, Peter M. Meissner, Hans L. Hartnagel, N. Chitica, Juergen Daleiden-, Klaus P. Streubel, Harald Kuenzel, and W. Goertz "Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302395
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