|
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
![Lens.org Logo](/images/Lens.org/lens-logo.png)
CITATIONS
Cited by 4 scholarly publications and 1 patent.
Microelectromechanical systems
Waveguides
Integrated optics
Polymers
Polymer multimode waveguides
Wafer-level optics
Metrology