Oxide-confined 2D VCSEL arrays for high-density inter/intra-chip interconnects

Roger King; Rainer Michalzik; Christian Jung; Martin Grabherr; Franz Eberhard; Roland Jaeger; Peter Schnitzer; Karl Joachim Ebeling

doi:10.1117/12.305445

20 April 1998 Oxide-confined 2D VCSEL arrays for high-density inter/intra-chip interconnects

Roger King, Rainer Michalzik, Christian Jung, Martin Grabherr, Franz Eberhard, Roland Jaeger, Peter Schnitzer, Karl Joachim Ebeling

Author Affiliations +

Proceedings Volume 3286, Vertical-Cavity Surface-Emitting Lasers II; (1998) https://doi.org/10.1117/12.305445
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

We have designed and fabricated 4 X 8 vertical-cavity surface-emitting laser (VCSEL) arrays intended to be used as transmitters in short-distance parallel optical interconnects. In order to meet the requirements of 2D, high-speed optical links, each of the 32 laser diodes is supplied with two individual top contacts. The metallization scheme allows flip-chip mounting of the array modules junction-side down on silicon complementary metal oxide semiconductor (CMOS) chips. The optical and electrical characteristics across the arrays with device pitch of 250 micrometers are quite homogeneous. Arrays with 3 micrometers , 6 micrometers and 10 micrometers active diameter lasers have been investigated. The small devices show threshold currents of 600 (mu) A, single-mode output powers as high as 3 mW and maximum wavelength deviations of only 3 nm. The driving characteristics of all arrays are fully compatible to advanced 3.3 V CMOS technology. Using these arrays, we have measured small-signal modulation bandwidths exceeding 10 GHz and transmitted pseudo random data at 8 Gbit/s channel over 500 m graded index multimode fiber. This corresponds to a data transmission rate of 256 Gbit/s per array of 1 X 2 mm² footprint area.

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Roger King, Rainer Michalzik, Christian Jung, Martin Grabherr, Franz Eberhard, Roland Jaeger, Peter Schnitzer, and Karl Joachim Ebeling "Oxide-confined 2D VCSEL arrays for high-density inter/intra-chip interconnects", Proc. SPIE 3286, Vertical-Cavity Surface-Emitting Lasers II, (20 April 1998); https://doi.org/10.1117/12.305445

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