Paper
1 April 1998 6 x 6-cm fully depleted pn-junction CCD for high-resolution spectroscopy in the 0.1- to 15-keV photon energy range
Christoph von Zanthier, Peter Holl, Josef Kemmer, Peter Lechner, Bernhard Maier, Heike Soltau, R. Stoetter, Heinrich W. Braeuninger, Konrad Dennerl, Frank Haberl, Robert Hartmann, Gisela D. Hartner, Horst Hippmann, E. Kastelic, W. Kink, Norbert Krause, Norbert Meidinger, Gerd Metzner, Elmar Pfeffermann, Martin Popp, Claus Reppin, Diana Stoetter, Lothar Strueder, Joachim E. Truemper, Ulrich Weber, D. Carathanassis, S. Engelhard, Th. Gebhart, D. Hauff, Gerhard Lutz, Rainer H. Richter, H. Seitz, P. Solc, Edgar Bihler, H. Boettcher, Eckhard Kendziorra, J. Kraemer, Bernhard Pflueger, Ruediger Staubert
Author Affiliations +
Proceedings Volume 3301, Solid State Sensor Arrays: Development and Applications II; (1998) https://doi.org/10.1117/12.304566
Event: Photonics West '98 Electronic Imaging, 1998, San Jose, CA, United States
Abstract
The concept and performance of the fully depleted pn- junction CCD system, developed for the European XMM- and the German ABRIXAS-satellite missions for soft x-ray imaging and spectroscopy in the 0.1 keV to 15 keV photon range, is presented. The 58 mm X 60 mm large pn-CCD array uses pn- junctions for registers and for the backside instead of MOS registers. This concept naturally allows to fully deplete the detector volume to make it an efficient detector to photons with energies up to 15 keV. For high detection efficiency in the soft x-ray region down to 100 eV, an ultrathin pn-CCD backside deadlayer has been realized. Each pn-CCD-channel is equipped with an on-chip JFET amplifier which, in combination with the CAMEX-amplifier and multiplexing chip, facilitates parallel readout with a pixel read rate of 3 MHz and an electronic noise floor of ENC < e-. With the complete parallel readout, very fast pn-CCD readout modi can be implemented in the system which allow for high resolution photon spectroscopy of even the brightest x-ray sources in the sky.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christoph von Zanthier, Peter Holl, Josef Kemmer, Peter Lechner, Bernhard Maier, Heike Soltau, R. Stoetter, Heinrich W. Braeuninger, Konrad Dennerl, Frank Haberl, Robert Hartmann, Gisela D. Hartner, Horst Hippmann, E. Kastelic, W. Kink, Norbert Krause, Norbert Meidinger, Gerd Metzner, Elmar Pfeffermann, Martin Popp, Claus Reppin, Diana Stoetter, Lothar Strueder, Joachim E. Truemper, Ulrich Weber, D. Carathanassis, S. Engelhard, Th. Gebhart, D. Hauff, Gerhard Lutz, Rainer H. Richter, H. Seitz, P. Solc, Edgar Bihler, H. Boettcher, Eckhard Kendziorra, J. Kraemer, Bernhard Pflueger, and Ruediger Staubert "6 x 6-cm fully depleted pn-junction CCD for high-resolution spectroscopy in the 0.1- to 15-keV photon energy range", Proc. SPIE 3301, Solid State Sensor Arrays: Development and Applications II, (1 April 1998); https://doi.org/10.1117/12.304566
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KEYWORDS
Semiconducting wafers

Charge-coupled devices

Field effect transistors

Sensors

Spectroscopy

X-rays

Cameras

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