Prototype of 2D direct x-ray a-SiN:H sensor array

Igor A. Popov; Geert P. S. Van Doorselaer; Andre Van Calster; Herbert De Smet; Freddy Callens; Etienne Boesman

doi:10.1117/12.304554

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1 April 1998 Prototype of 2D direct x-ray a-SiN:H sensor array

Igor A. Popov, Geert P. S. Van Doorselaer, Andre Van Calster, Herbert De Smet, Freddy Callens, Etienne Boesman

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Proceedings Volume 3301, Solid State Sensor Arrays: Development and Applications II; (1998) https://doi.org/10.1117/12.304554
Event: Photonics West '98 Electronic Imaging, 1998, San Jose, CA, United States

Abstract

Study of the possible use of a-SiN: H thin films for 2D direct x-ray sensor arrays lead to the development of a simple prototype. The sensor array is a 100 X 100 array of simple cross-over silicon rich a-SiN:H thin film diodes with sizes 200 X 200 micrometers formed on a 2 inch glass substrate. There are neither switching elements nor x-ray conversion layer involved which leads to extremely simple 2 mask processing for the whole array. Specific behavior of the a-SiN:H sensing diodes under x-ray irradiation requires special attention to be paid to the driving strategy and read out electronics. Experimental results obtained with the help of the prototype provide solid base for the discussion on both sensor properties and electronic components used for the sensor array control.

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Igor A. Popov, Geert P. S. Van Doorselaer, Andre Van Calster, Herbert De Smet, Freddy Callens, and Etienne Boesman "Prototype of 2D direct x-ray a-SiN:H sensor array", Proc. SPIE 3301, Solid State Sensor Arrays: Development and Applications II, (1 April 1998); https://doi.org/10.1117/12.304554

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