Fast-acting interference devices for surface roughness diagnostics

Oleg V. Angelsky; Ivan A. Buchkovsky; Peter P. Maksimyak; Micail A. Neduzhko

doi:10.1117/12.295694

1 December 1997 Fast-acting interference devices for surface roughness diagnostics

Oleg V. Angelsky, Ivan A. Buchkovsky, Peter P. Maksimyak, Micail A. Neduzhko

Proceedings Volume 3317, International Conference on Correlation Optics; (1997) https://doi.org/10.1117/12.295694
Event: International Conference on Correlation Optics, 1997, Chernivsti, Ukraine

Abstract

The relationship between statistical structure parameters of rough surface and associated correlation parameters of scattered field is used to develop a method for rough surface diagnostics. The treatment is based on the model of random phase object with inhomogeneity phase dispersion. The proposed diagnostic methods are applicable to surfaces with roughness period comparable to the radiation wavelength employed, low-reflectance and arbitrarily shaped surfaces, and surfaces of a thin plane-parallel plate. The sensitivity limit of the methods in measuring the standard deviation of surface profile form base line is about 0.003 mm.

Citation Download Citation

Oleg V. Angelsky, Ivan A. Buchkovsky, Peter P. Maksimyak, and Micail A. Neduzhko "Fast-acting interference devices for surface roughness diagnostics", Proc. SPIE 3317, International Conference on Correlation Optics, (1 December 1997); https://doi.org/10.1117/12.295694

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