Electrical and optical characterization of metal oxide/metal/polymer multilayer thin films

Irena Fryc

doi:10.1117/12.301351

1 January 1998 Electrical and optical characterization of metal oxide/metal/polymer multilayer thin films

Irena Fryc

Proceedings Volume 3320, Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics; (1998) https://doi.org/10.1117/12.301351
Event: Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics, 1996, Karpacz, Poland

Abstract

A new procedure for depositing three-layer structures [doped metal oxide/metal/metal oxide (In₂O₃/Ag/TiO₂)] on a glass substrate by applying different methods of film deposition was developed. To obtain the first film -- In₂O₃:Sn, the spray hydrolysis method was employed and for the second, a thin Ag film, the vacuum evaporation technique was used. The third film -- TiO₂ was obtained by the organic oxide compound polymerization method. The electrical and optical properties of the films and the multilayer structure thus obtained were investigated. The studies showed that the three-layer structure could be used as a broad-band infrared filter.

Citation Download Citation

Irena Fryc "Electrical and optical characterization of metal oxide/metal/polymer multilayer thin films", Proc. SPIE 3320, Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics, (1 January 1998); https://doi.org/10.1117/12.301351

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