Effects of titanium-silicide coating on the electrical characteristics of field emitters

Alex Hariz; In-Jae Chung

doi:10.1117/12.305613

16 April 1998 Effects of titanium-silicide coating on the electrical characteristics of field emitters

Alex Hariz, In-Jae Chung

Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305613
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India

Abstract

Silicidation of field emission tips brings about many improvements in device performance and long term reliability. Here we investigate the merits of titanium silicide coating as compared to other silicides including chromium. The silicidation takes place in two steps, deposition and high temperature alloying technique. Surface morphology was inspected and electrical characteristics were measured and compared with bare-silicon tips. The results show marked improvements in terms of lower turn-on voltage, enhanced emission, reduced current fluctuations, and homogeneous arrays. Moreover, titanium-silicide protected tips were harder, thermally stable, and discharge resistant.

Citation Download Citation

Alex Hariz and In-Jae Chung "Effects of titanium-silicide coating on the electrical characteristics of field emitters", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305613

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