Gas sensor development at BARC

A. K. Debnath; V. R. Katti; K. P. Muthe; S. C. Gadkari; S. C. Sabharwal; Vinod C. Sahni

doi:10.1117/12.305566

16 April 1998 Gas sensor development at BARC

A. K. Debnath, V. R. Katti, K. P. Muthe, S. C. Gadkari, S. C. Sabharwal, Vinod C. Sahni

Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305566
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India

Abstract

Thin films of SnO₂ when suitable doped are used for the detection of H₂S and H₂ gases. The results of the characterization showed that the gas sensing properties of the films are governed by the micro-structure, dopant used and the operating temperature of the film. For the H₂S gas sensors developed, the observed change in the conductivity for 10 ppm gas concentration was approximately 10⁴. By suitably altering the film resistance at ambient temperature, SnO₂ based sensors have been developed which can detect 100 ppb H₂S gas present in the environment.

Citation Download Citation

A. K. Debnath, V. R. Katti, K. P. Muthe, S. C. Gadkari, S. C. Sabharwal, and Vinod C. Sahni "Gas sensor development at BARC", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305566

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