Paper
16 April 1998 Magnetically driven self-moving microactuators
Kenji I. Arai, Mark K. Yamaguchi, T. Honda, K. Shimasaki
Author Affiliations +
Proceedings Volume 3321, 1996 Symposium on Smart Materials, Structures, and MEMS; (1998) https://doi.org/10.1117/12.305592
Event: Smart Materials, Structures and MEMS, 1996, Bangalore, India
Abstract
This paper describes new micro-magnetic actuators for self- moving (-walking, -flying, and -swimming) microrobots. Their actuation force is generated by the interaction between external magnetic fields and the magnetic materials used for actuators. Accordingly, they can move independently without power supply cables. The walking actuator, composed of magnetostrictive thin films and two inclined legs, is capable of a high velocity of 65 mm/s and a reversible motion with forward and backward. The flying actuator has a pair of hard magnetic film wings with two elastic hinges and a soft magnetic film wings with two elastic hinges and a soft magnetic wire body for attitude control. It can successfully fly without any cable or guide. Two kinds of swimming actuators, composed of a small magnet with an elastic fin or a spiral wire, can swim in viscous silicone oil with low Reynolds numbers.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenji I. Arai, Mark K. Yamaguchi, T. Honda, and K. Shimasaki "Magnetically driven self-moving microactuators", Proc. SPIE 3321, 1996 Symposium on Smart Materials, Structures, and MEMS, (16 April 1998); https://doi.org/10.1117/12.305592
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KEYWORDS
Magnetism

Actuators

Thin films

Magnetostrictive materials

Microactuators

Power supplies

Silicon

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