MEMS sensors and wireless telemetry for distributed systems

Charles L. Britton Jr.; R. J. Warmack; S. F. Smith; Patrick Ian Oden; Gilbert M. Brown; W. L. Bryan; Lloyd G. Clonts; Michael G. Duncan; Mike S. Emery; M. Nance Ericson; Z. Hu; Robert L. Jones; Michael R. Moore; J. A. Moore; Jim M. Rochelle; Timothy D. Threatt; Thomas G. Thundat; Gary W. Turner; Alan L. Wintenberg

doi:10.1117/12.320161

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20 July 1998 MEMS sensors and wireless telemetry for distributed systems

Charles L. Britton Jr., R. J. Warmack, S. F. Smith, Patrick Ian Oden, Gilbert M. Brown, W. L. Bryan, Lloyd G. Clonts, Michael G. Duncan, Mike S. Emery, M. Nance Ericson, Z. Hu, Robert L. Jones, Michael R. Moore, J. A. Moore, Jim M. Rochelle, Timothy D. Threatt, Thomas G. Thundat, Gary W. Turner, Alan L. Wintenberg

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Proceedings Volume 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS; (1998) https://doi.org/10.1117/12.320161
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

Selectively coated cantilevers are being developed at ORNL for chemical and biological sensing. The sensitivity can exceed that of other electro-mechanical devices as parts- per-trillion detection can be demonstrated for certain species. We are now proceeding to develop systems that employ electrically readable microcantilevers in a standard MEMS process and standard CMOS processes. One of our primary areas of interest is chemical sensing for environmental applications. Towards this end, we are presently developing electronic readout of a mercury-sensitive coated cantilever. In order to field arrays of distributed sensors, a wireless network for data reporting is needed. For this, we are developing on-chip spread-spectrum encoding and modulation circuitry to improve the robustness and security of sensor data in typical interference- and multipath-impaired environments. We have also provided for a selection of distinct spreading codes to serve groups of sensors in a common environment by the application of code-division multiple-access techniques. Most of the RF circuity we have designed and fabricated in 0.5 micrometers CMOS has been tested and verified operational to above 1 GHz. Our initial intended operation is for use in the 915 MHz Industrial, Scientific, and Medical band. This paper presents measured data on the microcantilever-based mercury detector. We will also present design data and measurements of the RF telemetry chip.

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Charles L. Britton Jr., R. J. Warmack, S. F. Smith, Patrick Ian Oden, Gilbert M. Brown, W. L. Bryan, Lloyd G. Clonts, Michael G. Duncan, Mike S. Emery, M. Nance Ericson, Z. Hu, Robert L. Jones, Michael R. Moore, J. A. Moore, Jim M. Rochelle, Timothy D. Threatt, Thomas G. Thundat, Gary W. Turner, and Alan L. Wintenberg "MEMS sensors and wireless telemetry for distributed systems", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320161

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