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20 July 1998 MEMS system design and verification tools
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Although MEMS device designers currently make use of process simulation, 3D visualization and finite element/boundary element analysis tools, MEMS systems designers lack the design and verification tools enjoyed by electronic circuit and systems designers. System level and circuit level simulation tools for MEMS are beginning to become available, but an important issue is the availability of macromodels. This paper discusses an integrated CAD tool suite based on extensions to VLSI electronic circuit and systems tools to handle signals in multiple energy domains. These tools maintain synchronized physical, structural and behavioral design views and work in conjunction with a library of MEMS schematic symbols, layout generators, and behavioral models. Integration of electronic circuit and systems tools and MEMS systems tools allow designers to address the important problems of ensuring system performance goals are met, system partitioning and determining the degree of integration of sensing/actuating devices and interface/calibration electronics. These new physical design and simulation tools are applied to fabricated design examples and the results are critiqued. Discussions of the merits and limitations of our tools and other design tools is also included. Links between system level tools and MEMS device design tools are also described.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mary Ann Perez-Maher and Hee Jung Lee "MEMS system design and verification tools", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998);


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