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20 July 1998Readout electronics scheme in CMOS technology for integration with analog outputs from integrated smart sensors
A digital readout electronics scheme in CMOS technology is described for integration with microelectromechanical sensors on the same chip. The readout criteria is general in nature and can be employed with a variety of analog sensors. The presented scheme in CMOS technology is fully integrable with the multiple sensor outputs either in a chain or an array format and is capable of detecting low analog output signals from a few (mu) V to mV range. The CMOS circuit design is compatible with +/- 1.5 V operation for low power consumption.
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Ashok Srivastava, S. V. Prasanna, Pratul K. Ajmera, "Readout electronics scheme in CMOS technology for integration with analog outputs from integrated smart sensors," Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320178