Developed wavelength-scanning interferometry and its application for distance measurement

Yong Wang; Yanbiao Liao; Qian Tian; Enyao Zhang; Min Zhang

doi:10.1117/12.316974

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21 July 1998 Developed wavelength-scanning interferometry and its application for distance measurement

Yong Wang, Yanbiao Liao, Qian Tian, Enyao Zhang, Min Zhang

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Proceedings Volume 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials; (1998) https://doi.org/10.1117/12.316974
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

A developed wavelength scanning fiber-optic interferometry has been studied in this paper. Using this method for distance/displacement measurement, we adopt a tunable external cavity semiconductor laser to simultaneously illuminate two Fabry-Perot interferometers, one as the sensing interferometer, the other as the reference interferometry. We analyze the characteristics of the scanning source and the interferometric signals, then illustrate the limitation of the measurement accuracy and resolution in terms of theory. The experimental results show that the accuracy of 0.05 micrometers and resolution of 0.01 micrometers are achieved, in the range of 1 mm.

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Yong Wang, Yanbiao Liao, Qian Tian, Enyao Zhang, and Min Zhang "Developed wavelength-scanning interferometry and its application for distance measurement", Proc. SPIE 3330, Smart Structures and Materials 1998: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials, (21 July 1998); https://doi.org/10.1117/12.316974

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