High-power extreme-ultraviolet source based on gas jets

Glenn D. Kubiak; Luis J. Bernardez II; Kevin D. Krenz

doi:10.1117/12.309560

5 June 1998 High-power extreme-ultraviolet source based on gas jets

Glenn D. Kubiak, Luis J. Bernardez II, Kevin D. Krenz

Proceedings Volume 3331, Emerging Lithographic Technologies II; (1998) https://doi.org/10.1117/12.309560
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

We report on the development of a high-power laser plasma extreme UV (EUV) source for EUV. The source is based on the plasma emission of a recycled jet beam of large Xe clusters and produces no particular debris. The source will be driven by a pulsed laser delivering 1500 W of focused average power to the cluster jet target. To develop condensers and to optimize source performance, a low-power laboratory cluster jet prototype has been used to study the spectroscopy, angular distributions, and EUV source images of the cluster jet plasma emission. In addition, methods to improve the reflectance lifetimes of nearby plasma-facing condenser mirrors have been developed. The resulting source yields EUV conversion efficiencies up to 3.8 percent and mirror lifetimes of approximately 10⁹ plasma pulses, with further improvement anticipated.

Citation Download Citation

Glenn D. Kubiak, Luis J. Bernardez II, and Kevin D. Krenz "High-power extreme-ultraviolet source based on gas jets", Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); https://doi.org/10.1117/12.309560

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