Contrast enhancement by alkali decomposable additives in quinonediazide-type positive resists

Yasunori Uetani; Jun Tomioka; Hiroshi Moriuma; Yoshiko Miya

doi:10.1117/12.312443

29 June 1998 Contrast enhancement by alkali-decomposable additives in quinonediazide-type positive resists

Yasunori Uetani, Jun Tomioka, Hiroshi Moriuma, Yoshiko Miya

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312443
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

We have developed the new contrast enhancement method using an alkali decomposable compound. This compound is hydrophobic and water insoluble, but decomposes to water soluble hydrophilic compounds by contact with alkaline developer. This solubility change makes high dissolution contrast between exposed and unexposed area. Good profiles are obtained by addition of this compound to quinonediazide type positive resist.

Citation Download Citation

Yasunori Uetani, Jun Tomioka, Hiroshi Moriuma, and Yoshiko Miya "Contrast enhancement by alkali-decomposable additives in quinonediazide-type positive resists", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312443

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