Image reversal at nm scales

Saleem H. Zaidi; Xiaolan Chen; Steven R. J. Brueck

doi:10.1117/12.312437

29 June 1998 Image reversal at nanometer scales

Saleem H. Zaidi, Xiaolan Chen, Steven R. J. Brueck

Proceedings Volume 3333, Advances in Resist Technology and Processing XV; (1998) https://doi.org/10.1117/12.312437
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

Interferometric lithography techniques provide low-cost, large area nanoscale resolution. It is difficult to control positive resist process with narrow spaces (large line: space ratios) because of the large slope of the swing curve just as the resist clears. The sidewalls are inherently sloped with significant standing wave related distortions. Also, at nm-scales, resist pattern collapse becomes a serious limiting issue. We report on investigations of image reversal using positive photoresist AZ5206E. This photoresist is designed for reversal with a simple heating step followed by a blanket UV exposure. 1D photoresist gratings were investigated with CDs varying from approximately 100 - 250 nm. The image reversal process significantly reduced standing wave effects, eliminated the collapse issue, and provided under-cut profiles suitable for lift-off. At periods < 300 nm, high aspect ratios with this photoresist could not be achieved probably due to a lack of resolution. Image reversal was also demonstrated in multiple exposure processes leading to sharp, square corners. Finally, the developed photoresist profiles with the image reversal process were found to be in good agreement with the Prolith^TM modeling.

Citation Download Citation

Saleem H. Zaidi, Xiaolan Chen, and Steven R. J. Brueck "Image reversal at nanometer scales", Proc. SPIE 3333, Advances in Resist Technology and Processing XV, (29 June 1998); https://doi.org/10.1117/12.312437

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available