EUROSTEP 2000: New Steps In Wafer Steppers

Paul Tigreat

doi:10.1117/12.933564

13 September 1982 EUROSTEP 2000: New Steps In Wafer Steppers

Paul Tigreat

Proceedings Volume 0334, Optical Microlithography I: Technology for the Mid-1980s; (1982) https://doi.org/10.1117/12.933564
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

EUROSTEP 2000 is a new wafer-stepper oriented towards three increasing requirements coming from integrated circuits manufacturing : throughput : in order to be faster than modified step and repeat cameras, EUROSTEP 2000 uses a stage made of a sandwich of aluminum honeycomb and carbon fiber, at least as stiff as metallic stages but much lighter. This allows high accelerations (0,3 g) and a maximum speed of 200 millimeters/second. Joined to a short exposure time (<150 ms) and a short alignment time, the high stepping speed provides the same throughput as 1 to 1 projection aligners. repeatability : For mix and match requirements, all variations of metrology between two identical or different equipments must be avoided. For positioning, EUROSTEP 2000 uses HOLOGRID, a proprietary X - Y holographic grating interferometry. The holographic grating is a stiff replica of a master standard, with short term and long term repeatability, not affected at all by pressure, humidity, and fast variations of temperature. resolution : EUROSTEP 2000 is oriented towards manufacturing of micron and submicron devices. The present lens is able to print 0.7 micrometer lines and spaces everywhere in the 1 cm2 field. This lens could be replaced by another one, according to wanted field-resolution trade-offs, without any other change in the machine, including the die to reticle automatic alignment device. In order to allow submicrometer printing in 1 cm2 field, die by die autoleveling compensates for wafer defects of flatness, when necessary.

Citation Download Citation

Paul Tigreat "EUROSTEP 2000: New Steps In Wafer Steppers", Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); https://doi.org/10.1117/12.933564

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