Registration Accuracy In Several Versions Of A Scanning 1:1 Optical Projection System

Rene Vervoordeldonk; Peter Willemse; Roel Kramer; Tony Cowburn

doi:10.1117/12.933556

13 September 1982 Registration Accuracy In Several Versions Of A Scanning 1:1 Optical Projection System

Rene Vervoordeldonk, Peter Willemse, Roel Kramer, Tony Cowburn

Proceedings Volume 0334, Optical Microlithography I: Technology for the Mid-1980s; (1982) https://doi.org/10.1117/12.933556
Event: 1982 Microlithography Conferences, 1982, Santa Clara, United States

Abstract

The factors influencing registration accuracy in a scanning 1:1 optical projection system are investigated. The overall registration accuracy in several versions of this system is evaluated. Data was gathered either optically, using Vernier patterns, or electrically, using an automated measurement technique.

Citation Download Citation

Rene Vervoordeldonk, Peter Willemse, Roel Kramer, and Tony Cowburn "Registration Accuracy In Several Versions Of A Scanning 1:1 Optical Projection System", Proc. SPIE 0334, Optical Microlithography I: Technology for the Mid-1980s, (13 September 1982); https://doi.org/10.1117/12.933556

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