Comparative study of laser-assisted removal and transfer in the deposition of Al2O3 and ZrO2 thin films for different pulse duration

Ernst-Wolfgang Kreutz; Mirka Alunovic; Holger Stamm

doi:10.1117/12.321579

14 September 1998 Comparative study of laser-assisted removal and transfer in the deposition of Al₂O₃ and ZrO₂ thin films for different pulse duration

Ernst-Wolfgang Kreutz, Mirka Alunovic, Holger Stamm

Author Affiliations +

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321579
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

Investigations of material transfer comparatively has been carried out using micro- to nano second laser-assisted removal of ceramics (Al₂O₃, ZrO₂) onto different substrates (steel, Si) for various laser parameters (wavelength, pulse energy, repetition rate, fluence) and processing variables (processing gas properties, target- substrate-distance). The transfer of the material was examined by high-speed photography, beam deflection, and optical spectroscopy. The experimental results, which are related to theoretical ones, are discussed in view of applications.

Citation Download Citation

Ernst-Wolfgang Kreutz, Mirka Alunovic, and Holger Stamm "Comparative study of laser-assisted removal and transfer in the deposition of Al₂O₃ and ZrO₂ thin films for different pulse duration", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321579

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