Scaling of a Q-switch CO2 laser for pulsed laser deposition

Andreas Husmann; Markus Niessen; Frank Gruembel; Ernst-Wolfgang Kreutz; Reinhart Poprawe

doi:10.1117/12.321599

14 September 1998 Scaling of a Q-switch CO₂ laser for pulsed laser deposition

Andreas Husmann, Markus Niessen, Frank Gruembel, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume 3343, High-Power Laser Ablation; (1998) https://doi.org/10.1117/12.321599
Event: High-Power Laser Ablation, 1998, Santa Fe, NM, United States

Abstract

In Pulsed Laser Deposition the laser parameters pulse duration, repetition rate, and average output power are important parameters for control of the resulting film properties. In order to obtain high deposition and coverage rates the use of powerful laser radiation sources is required. A new approach is the use of Q-switch CO₂ lasers, making accessible the range of kW average output powers for PLD. A common industrial fast axial gas flow rf-excited CO₂-laser is equipped with a mechanical Q-switch assembly. The characteristic properties of this laser radiation source are studied by measurements of the average output power and of the spatial and temporal intensity distribution of the laser radiation. Results show, that the laser operates in multimode or in TEM₁₀ mode depending on the use of apertures in the resonator. Variation of the electrical rf-excitation (in synchronization with the Q-switch) influences the pulse duration and shape, repetition rate, and average output power. Based on the experimental findings model calculations are carried out, in order to predict the pulse energy and average output power of the laser radiation source, when operating with different Q-switch parameters, e.g. higher repetition rates.

Citation Download Citation

Andreas Husmann, Markus Niessen, Frank Gruembel, Ernst-Wolfgang Kreutz, and Reinhart Poprawe "Scaling of a Q-switch CO₂ laser for pulsed laser deposition", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321599

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