Cryogenic spectrometric ellipsometer for studying solid state optical properties

Alla I. Belyaeva; T. G. Grebennik

doi:10.1117/12.306252

20 April 1998 Cryogenic spectrometric ellipsometer for studying solid state optical properties

Alla I. Belyaeva, T. G. Grebennik

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306252
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

Cryogenic spectrometric ellipsometer (CSE) for studding solid state optical properties was developed. CSE permits determination of the optical constants of solid in the range between 0.3 and 2 micron, in temperature interval from 5 up to 300 K. CSE is used for bulk samples characterization and thin films including multilayers stacks analysis (refractive indices and absorption coefficients (pseudodielectric functions) and thickness measurement). The special small continuous flow cryostat had been designed for studies in the wide temperature range. The angles of incidence are changed from 45 to 70 degree(s) discretely by the position of the cryostat windows.

Citation Download Citation

Alla I. Belyaeva and T. G. Grebennik "Cryogenic spectrometric ellipsometer for studying solid state optical properties", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306252

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