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22 July 1998 Test structures and performance analysis for uncooled resistance bolometer detector arrays
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Abstract
The performance of uncooled infrared focal plane detector arrays depends on optimization of critical parameters which are determined by geometrical design and the electrical, optical and thermophysical properties of the detector materials. It is desirable to monitor these parameters during array preparation using test cells which are independent of the main array and which can subsequently be used to provide data for performance analysis. This paper describes the use of test structures which function as process control modules and monitor cells for material parameters, from which array operability and performance can be assessed. The focal plane detector arrays described in the paper were designed by Electro-optic Sensor Design and manufactured by the Defence Science and Technology Organization, Australia, in collaboration with the Defence Research Establishment, Sweden.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kevin Charles Liddiard, Olaf Reinhold, Ulf Ringh, and Christer Jansson "Test structures and performance analysis for uncooled resistance bolometer detector arrays", Proc. SPIE 3379, Infrared Detectors and Focal Plane Arrays V, (22 July 1998); https://doi.org/10.1117/12.317578
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