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4 September 1998 MEMS devices for detecting the presence of explosive material residues in mine fields
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We report on the development of MEMS devices for detecting explosive particles associated with anti-personnel mines. Because of the affinity of explosive substances for surfaces and owing to the high partition coefficients of explosives in soils relative to water and air, we employ remote stimulation of the soil's surface with a high intensity, focused air ultrasonic beam whose energy can megasonically clean the target area of particles above a designed-for size. We have fabricated a MEMS electrostatic transducer to test the concept. Nanogram particle detection will occur by collecting particles on an array of temperature sensitive MEMS sensors and irradiating the particles with 3 - 5 micrometer wavelength infrared light. Explosive particles will selectively absorb the infrared energy at approximately 1600 cm-1, decompose, and give off heat which can be detected. Prototype explosive detectors have been fabricated which do not absorb energy in the peak absorption bands of the explosives, thus allowing for selective particle heating without heating the sensor device itself.
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Richard B. Fair, Michael Pollack, and Vamsee K. Pamula "MEMS devices for detecting the presence of explosive material residues in mine fields", Proc. SPIE 3392, Detection and Remediation Technologies for Mines and Minelike Targets III, (4 September 1998);

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