Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence

Sang-Youl Kim; Sang J. Kim; Hun Seo; Myong R. Kim

doi:10.1117/12.327935

23 October 1998 Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence

Sang-Youl Kim, Sang J. Kim, Hun Seo, Myong R. Kim

Author Affiliations +

Proceedings Volume 3401, Optical Data Storage '98; (1998) https://doi.org/10.1117/12.327935
Event: Optical Data Storage '98, 1998, Aspen, CO, United States

Abstract

The complex refractive index of phase-change Ge₂Sb_2+xTe₅ media fabricated by DC magnetron sputtering has been determined by using spectroscopic ellipsometry and atomic force microscopy. The composition of Ge₂Sb_2+xTe₅ analyzed by Inductively Coupled Plasma/Atomic Emission Spectrometer and X-ray Fluorescence was in the range 0.08 less than or equal to x less than or equal to 0.58. The complex refractive index and the reflectivity have been verified nearly constant with Sb-addition at 780 nm, 650 nm, and 410 nm, respectively.

Citation Download Citation

Sang-Youl Kim, Sang J. Kim, Hun Seo, and Myong R. Kim "Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence", Proc. SPIE 3401, Optical Data Storage '98, (23 October 1998); https://doi.org/10.1117/12.327935

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