Optoelectronic micropositioning device with a piezoceramic transducer

Irinela Chilibon; Maria Robu

doi:10.1117/12.312680

2 July 1998 Optoelectronic micropositioning device with a piezoceramic transducer

Irinela Chilibon, Maria Robu

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312680
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

This paper presents an experimental study on the behavior of piezoceramics type PZT, having a high compliance, and their application for an optoelectronic micropositioner device with piezoceramic transducer. The piezoelectric ceramics are crystallite conglomerate ferroelectrics materials with random orienting. In the laboratory we have realized PZT ceramics with various additions (Ni, Bi, Mn), presenting high compliance, for optoelectronic micropositioning device in micrometry displacements. The experimental transducers, realized like stacks of 30 divided by 35 pieces of PZT thin disks, supplied with 0 divided by 1000 V voltages, have produced 0 divided by 15 micrometers displacements.

Citation Download Citation

Irinela Chilibon and Maria Robu "Optoelectronic micropositioning device with a piezoceramic transducer", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312680

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