Synthesis, characterization, and mechanical properties of carbides and nitrides films prepared by pulsed-laser-deposition method

Ashock Kumar; H. L. Chan; Rodica Alexandrescu

doi:10.1117/12.312742

2 July 1998 Synthesis, characterization, and mechanical properties of carbides and nitrides films prepared by pulsed-laser-deposition method

Ashock Kumar, H. L. Chan, Rodica Alexandrescu

Author Affiliations +

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312742
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

Carbides and nitrides of metal have a large number of applications in modern technology owing to their interesting, and in some ways unique, physical and chemical properties. Thin film coatings of titanium carbide and aluminum nitride were deposited on Si (100) substrates using pulsed laser deposition method. The structural and microstructural properties of these films have been characterized using x-ray diffraction, and Fourier transform infrared spectroscopic techniques. The mechanical properties of the films were evaluated to measure the hardness and modulus values. It has been shown that the films deposited at higher temperature have the best crystalline quality structure and also have higher hardness values compared to the film deposited at lower temperatures.

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Ashock Kumar, H. L. Chan, and Rodica Alexandrescu "Synthesis, characterization, and mechanical properties of carbides and nitrides films prepared by pulsed-laser-deposition method", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312742

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