Multilayer optics for x-ray and gamma radiation

S. S. Andreev; Sergey V. Gaponov; Nikolai N. Salashchenko; E. A. Shamov; Leonid A. Shmaenok; Sergei V. Bobashev; Dmitrii M. Simanovski; Eugene N. Ragozin

doi:10.1117/12.310983

25 June 1998 Multilayer optics for x-ray and γ radiation

S. S. Andreev, Sergey V. Gaponov, Nikolai N. Salashchenko, E. A. Shamov, Leonid A. Shmaenok, Sergei V. Bobashev, Dmitrii M. Simanovski, Eugene N. Ragozin

Author Affiliations +

Proceedings Volume 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves; (1998) https://doi.org/10.1117/12.310983
Event: Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-Based Spectroscopy in XUV, UV, IR, 1998, none, Russian Federation

Abstract

We report the experimental results on production of multilayer soft x-ray and EUV mirrors and their application in x-ray spectroscopy and fluorescence analysis, as well as for development of EUV lithographic and x-ray microscopic devices and soft x-ray point sources. The problem of the production and the investigation of short-period x-ray multilayers and multilayer (gamma) -filters is discussed.

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S. S. Andreev, Sergey V. Gaponov, Nikolai N. Salashchenko, E. A. Shamov, Leonid A. Shmaenok, Sergei V. Bobashev, Dmitrii M. Simanovski, and Eugene N. Ragozin "Multilayer optics for x-ray and γ radiation", Proc. SPIE 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves, (25 June 1998); https://doi.org/10.1117/12.310983

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