Spectroscopic characterization of plane multilayer diffraction gratings using a laser-produced plasma XUV radiation source

Nikolai N. Kolachevsky; Mikhail M. Mitropolsky; Eugene N. Ragozin; S. Bac; Philippe Troussel

doi:10.1117/12.310985

25 June 1998 Spectroscopic characterization of plane multilayer diffraction gratings using a laser-produced plasma XUV radiation source

Nikolai N. Kolachevsky, Mikhail M. Mitropolsky, Eugene N. Ragozin, S. Bac, Philippe Troussel

Author Affiliations +

Proceedings Volume 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves; (1998) https://doi.org/10.1117/12.310985
Event: Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-Based Spectroscopy in XUV, UV, IR, 1998, none, Russian Federation

Abstract

Spectral characteristics of plane multilayer amplitude molybdenum-silicon diffraction gratings (1000 and 2000 lines/mm, d-spacing of 115 angstrom), fabricated by electron- beam lithography, were determined using a laser-produced plasma XUV radiation source. The gratings were studied at near-normal incidence and at an angle of incidence of 36 degrees in stigmatic and quasi-stigmatic spectrograph systems with moderate dispersion. The task of focusing radiation was imposed on either a grazing-incidence toroidal mirror or a normal-incidence Mo-Si multilayer mirror with a d-spacing of 115 angstrom. The spectral profile of resonance reflection by the gratings was determined in the first and second Bragg orders of the multilayer structure for different angles of incidence. Line spectra of multiply charged F, Na, Mg, and Cl ions were recorded in the 160 - 230 angstrom range by means of these multilayer gratings, and the resolving power of the gratings was determined.

Citation Download Citation

Nikolai N. Kolachevsky, Mikhail M. Mitropolsky, Eugene N. Ragozin, S. Bac, and Philippe Troussel "Spectroscopic characterization of plane multilayer diffraction gratings using a laser-produced plasma XUV radiation source", Proc. SPIE 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves, (25 June 1998); https://doi.org/10.1117/12.310985

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