100-nm defect detection using an existing image acquistion system

Anthony Vacca; Benjamin George Eynon Jr.; Steve Yeomans

doi:10.1117/12.328857

1 September 1998 100-nm defect detection using an existing image acquistion system

Anthony Vacca, Benjamin George Eynon Jr., Steve Yeomans

Author Affiliations +

Proceedings Volume 3412, Photomask and X-Ray Mask Technology V; (1998) https://doi.org/10.1117/12.328857
Event: Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, 1998, Kawasaki City, Japan

Abstract

For obvious cost reasons, semiconductor manufacturers are constantly striving to produce ever smaller wafer geometries with the current installed base of wafer steppers. Many techniques have been used successfully to 'squeeze' more resolution from these steppers than was once thought possible. Wafers processed using non-aggressive k₁ factors provided a linear correlation between mask and wafer feature sizes. However, it has been shown that pushing k₁ factors to very low levels causes a nonlinear response between changes in photomask and wafer critical dimension. This non-linearity demands extremely tight photomask CD control specifications. Total CD errors 50nm and smaller can cause unacceptable wafer CD variation. In this paper, defect sensitivity and false detection performance of a new advanced line measurement algorithm was tested. The test vehicles included both an industry standard and a custom designed programmed defect test mask. In addition, production masks with naturally occurring localized CD errors that caused wafer pattern bridging were analyzed. This new experimental algorithm has shown localized CD error detection of <EQ 100 nm reticle defects.

Citation Download Citation

Anthony Vacca, Benjamin George Eynon Jr., and Steve Yeomans "100-nm defect detection using an existing image acquistion system", Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); https://doi.org/10.1117/12.328857

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