Detection of 60-deg phase defects on alternating PSMs

Chris A. Spence; David Emery; Larry S. Zurbrick; Durai P. Prakash; X. Chang; Steve Khanna; Brent D. Leback; Eiji Tsujimoto; Greg P. Hughes; Baorui Yang

doi:10.1117/12.328859

1 September 1998 Detection of 60° phase defects on alternating PSMs

Chris A. Spence, David Emery, Larry S. Zurbrick, Durai P. Prakash, X. Chang, Steve Khanna, Brent D. Leback, Eiji Tsujimoto, Greg P. Hughes, Baorui Yang

Author Affiliations +

Proceedings Volume 3412, Photomask and X-Ray Mask Technology V; (1998) https://doi.org/10.1117/12.328859
Event: Photomask Japan '98 Symposium on Photomask and X-Ray Mask Technology V, 1998, Kawasaki City, Japan

Abstract

In this paper we present results of an algorithm that has been developed which is sensitive to phase defects of 60 degrees on i-line alternating PSMs. This algorithm consists of microcode and software, which can be loaded into existing inspection hardware. The algorithm works in die-to-die inspection mode and uses both transmitted and reflected light images to maximize sensitivity. Isolated phase defects as well as phase defects close to chrome edges were inspected. In addition, the algorithm is able to detect missing and mis-aligned shifter edges. A programmed phase defect test plate was developed to characterize defect detection sensitivity. Detection of 60 degrees defects smaller than 0.75 micrometers has been demonstrated with this algorithm. Defect sensitivity characterization and actual production plate effect results are shown. Finally, recent results showing the application of the algorithm to the inspection of Deep-UV multiphase reticles using a shorter inspection wavelength are presented.

Citation Download Citation

Chris A. Spence, David Emery, Larry S. Zurbrick, Durai P. Prakash, X. Chang, Steve Khanna, Brent D. Leback, Eiji Tsujimoto, Greg P. Hughes, and Baorui Yang "Detection of 60° phase defects on alternating PSMs", Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); https://doi.org/10.1117/12.328859

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