Inspecting the microprofile and defects of optical surfaces using an atomic-force microscope

Jianbai Li; Shaorong Xiao; Anging Zhuo; Dacheng Li

doi:10.1117/12.311095

18 June 1998 Inspecting the microprofile and defects of optical surfaces using an atomic-force microscope

Jianbai Li, Shaorong Xiao, Anging Zhuo, Dacheng Li

Proceedings Volume 3422, Input/Output and Imaging Technologies; (1998) https://doi.org/10.1117/12.311095
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

In this paper, an Atomic Force Microscope (AFM) with laser lever and its application inspecting microprofile of optical surface are presented. The nanometer-grade defects in optical and supersmooth surface can be tested by AFM. The microprofile drawings have the accuracy higher than (0.1 - 1 nm) in both vertical and lateral resolution. Some testing results of optical and supersmooth surfaces are shown in the paper.

Citation Download Citation

Jianbai Li, Shaorong Xiao, Anging Zhuo, and Dacheng Li "Inspecting the microprofile and defects of optical surfaces using an atomic-force microscope", Proc. SPIE 3422, Input/Output and Imaging Technologies, (18 June 1998); https://doi.org/10.1117/12.311095

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